JZJ(P)系列羅茨旋片真空機組
|
機組型號
Model
|
泵型號Pump Model
|
抽氣速率
Pumping Speed(L/S)
|
極限壓力
Ultimate Pressure
|
進氣口徑
Inlet
Diam
(mm)
|
排氣口徑
Outlet
Diam
(mm)
|
配用功率Motor Power(KW)
|
|
主泵
Brief
Pump
|
前級泵Backing Pump
|
(Pa)
|
(Torr)
|
主泵
Brief
Pump
|
前級泵Backing Pump
|
|
I
|
II
|
I
|
II
|
|
JZP2X70-5
|
ZJP-70D
|
2X-15
|
|
70
|
1X10-2
|
8X10-5
|
80
|
36
|
1.1
|
2.2
|
|
|
JZP2X150-5
|
ZJP-150D
|
2X-30
|
|
150
|
1X10-2
|
8X10-5
|
100
|
50
|
2.2
|
3
|
|
|
JZP2X300-4
|
ZJP-300D
|
2X-70
|
|
300
|
1X10-2
|
8X10-5
|
150
|
90
|
4
|
5.5
|
|
|
JZCSG70-3
|
ZJC-70D
|
SVG-100B
|
|
70
|
5
|
4X10-2
|
80
|
58
|
1.1
|
2.2
|
|
|
JZCSG150-3
|
ZJC-150D
|
SVG-200
|
|
150
|
1
|
7.5X10-3
|
100
|
58
|
2.2
|
4
|
|
|
JZCSG300-4
|
ZJC-300D
|
SVG-300B
|
|
300
|
1
|
7.5X10-3
|
150
|
58
|
4
|
5.5
|
|
|
JZPSG70-4
|
ZJP-70D
|
SVG-65
|
|
70
|
5
|
4X10-2
|
80
|
39
|
1.1
|
1.5
|
|
|
JZPSG150-6
|
ZJP-150D
|
SVG-100
|
|
150
|
5
|
4X10-2
|
100
|
58
|
2.2
|
2.2
|
|
|
JZPSG260-6
|
ZJP-260
|
SVG-200
|
|
260
|
1
|
7.5X10-3
|
100
|
58
|
4
|
4
|
|
|
JZPSG300-4
|
ZJP-300D
|
SVG-300B
|
|
300
|
1
|
7.5X10-3
|
150
|
58
|
4
|
4
|
|
|
JZCRVP300-4
|
ZJC-300D
|
RVP-275
|
|
300
|
0.5
|
3.7X10-3
|
300
|
|
4
|
7.5
|
|
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